Equipment
: Analytical Wafer Prober Features: Light protected measurement station including vacuum chuck and 8 measuring needle tips Agilent 4156C © LS MNE / TU Dortmund Description: Parameter analyser Features: [...] to 5 MHz, 1 mΩ to 1 TΩ Zurich Instruments UHFLI Features: DC - 600 MHz Lock-in Amplifier, 14 bits, 1.8 GSa/s, ±150 mV, ±1.5 V (high-impedance load), -12.5 dBm, 7.5 dBm (50 Ω load), Spectrum Analyzer Keithley [...] S2100 © LS MNE / TU Dortmund Description: Plasma ashing Features: Etching via oxygen plasma, max. 8-inch wafer Implantation and Doping Technology HighVoltage Engineering Europe © LS MNE / TU Dortmund …